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紧凑的镜头少数字全息显微镜的MEMS检测与表征
JoVE Journal
Engineering
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JoVE Journal
Engineering
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Please note that all translations are automatically generated.
Click here for the English version.
紧凑的镜头少数字全息显微镜的MEMS检测与表征
DOI:
10.3791/53630-v
•
10:28 min
•
July 05, 2016
•
Thomas Bourgade
,
Sun Jianfei
,
Zhaomin Wang
,
Rosmin Elsa
,
Anand Asundi
2
1
School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering
,
Nanyang Technological University
,
2
d’Optron Pte Ltd
Chapters
00:05
Title
01:05
Preparations
03:52
Data Acquisition
05:38
Data Analysis for Static Measurements
06:40
Sample Preparation and Data Analysis for Dynamic Measurements
07:42
Results: CDHM Compared to Atomic Force Microscopy and Other Results
09:17
Conclusion
Summary
Automatic Translation
English (Original)
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Automatic Translation
我们提出了一个小巧的反射全息数字化系统(CDHM)MEMS器件的检测和鉴定。论证采用发散输入波提供自然几何放大倍率的镜头,无设计。静态和动态的研究介绍。
Tags
Compact Digital Holographic Microscope
MEMS Inspection
MEMS Characterization
Full-field Optical Measurement
Non-contact
Real-time
High-resolution
3D Mapping
Lens-less
Compact
Wafer Inspection
Micro-optics
Diffractive Optics
Bioimaging
Silicon Wafer
Gold Electrodes
3D View Software
DMx 41BU02 Camera
Y800 Video Format
Reflection Or Transmission Mode
633 Nm Wavelength
4.65 μm Pixel Size
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