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MEMS Muayene ve Karakterizasyonu için kompakt Lens az Dijital Holografik Mikroskop
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Engineering
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JoVE Journal Engineering
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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MEMS Muayene ve Karakterizasyonu için kompakt Lens az Dijital Holografik Mikroskop

Türkçe

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10,141 Views

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10:28 min

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July 05, 2016

DOI:

10.3791/53630-v

DOI:
10.3791/53630-v

•

10:28 min
July 05, 2016

•

3 Views
, , , ,
1School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering,Nanyang Technological University, 2d’Optron Pte Ltd

Summary

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Biz MEMS cihazlarının muayene ve karakterizasyonu için kompakt bir yansıma dijital holografik sistemini (CDHM) sunuyoruz. Doğal geometrik büyütme sağlayan uzaklaşan giriş dalga kullanan bir lens daha az tasarım gösterilmiştir. Hem statik ve dinamik çalışmalar sunulmuştur.

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Cite this Article

Bourgade, T., Jianfei, S., Wang, Z., Elsa, R., Asundi, A. Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization. J. Vis. Exp. (113), e53630, doi:10.3791/53630 (2016).

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