Journal
/
Engenharia
/
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
JoVE Journal
Engenharia
É necessária uma assinatura da JoVE para visualizar este conteúdo.  Faça login ou comece sua avaliação gratuita.
JoVE Journal Engenharia
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

10,141 Views

•

10:28 min

•

July 05, 2016

DOI:

10.3791/53630-v

DOI:
10.3791/53630-v

•

10:28 min
July 05, 2016

•

3 Views
, , , ,
1School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering,Nanyang Technological University, 2d’Optron Pte Ltd

Summary

Automatically generated

We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

Explore More Videos

Compact Digital Holographic MicroscopeMEMS InspectionMEMS CharacterizationFull-field Optical MeasurementNon-contactReal-timeHigh-resolution3D MappingLens-lessCompactWafer InspectionMicro-opticsDiffractive OpticsBioimagingSilicon WaferGold Electrodes3D View SoftwareDMx 41BU02 CameraY800 Video FormatReflection Or Transmission Mode633 Nm Wavelength4.65 μm Pixel Size

Read Article

Cite this Article

Bourgade, T., Jianfei, S., Wang, Z., Elsa, R., Asundi, A. Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization. J. Vis. Exp. (113), e53630, doi:10.3791/53630 (2016).

Download .ris file

Copy

Share Video

.

Copy