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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

10,141 Views

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10:28 min

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July 05, 2016

DOI:

10.3791/53630-v

DOI:
10.3791/53630-v

•

10:28 min
July 05, 2016

•

3 Views
, , , ,
1School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering,Nanyang Technological University, 2d’Optron Pte Ltd

Summary

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We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

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Compact Digital Holographic MicroscopeMEMS InspectionMEMS CharacterizationFull-field Optical MeasurementNon-contactReal-timeHigh-resolution3D MappingLens-lessCompactWafer InspectionMicro-opticsDiffractive OpticsBioimagingSilicon WaferGold Electrodes3D View SoftwareDMx 41BU02 CameraY800 Video FormatReflection Or Transmission Mode633 Nm Wavelength4.65 μm Pixel Size

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Bourgade, T., Jianfei, S., Wang, Z., Elsa, R., Asundi, A. Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization. J. Vis. Exp. (113), e53630, doi:10.3791/53630 (2016).

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