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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

DOI:
10.3791/53630-v

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10:28 min

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July 05, 2016

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, , , ,
1School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering,Nanyang Technological University, 2d’Optron Pte Ltd

Chapters

  • 00:05Title
  • 01:05Preparations
  • 03:52Data Acquisition
  • 05:38Data Analysis for Static Measurements
  • 06:40Sample Preparation and Data Analysis for Dynamic Measurements
  • 07:42Results: CDHM Compared to Atomic Force Microscopy and Other Results
  • 09:17Conclusion

Summary

자동 번역

자동 번역

We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

Tags

Compact Digital Holographic MicroscopeMEMS InspectionMEMS CharacterizationFull-field Optical MeasurementNon-contactReal-timeHigh-resolution3D MappingLens-lessCompactWafer InspectionMicro-opticsDiffractive OpticsBioimagingSilicon WaferGold Electrodes3D View SoftwareDMx 41BU02 CameraY800 Video FormatReflection Or Transmission Mode633 Nm Wavelength4.65 μm Pixel Size

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