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April 01, 2020
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在这里，我们描述了包含光学相控阵列的SiN集成光子电路的运行情况。这些电路用于在近红外发射低发散激光束，并引导它们以两维。
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Tyler, N. A., Guerber, S., Fowler, D., Malhouitre, S., Garcia, S., Grosse, P., Szelag, B. Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station. J. Vis. Exp. (158), e60269, doi:10.3791/60269 (2020).
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