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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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April 01, 2020
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Here, we describe the operation of a SiN integrated photonic circuit containing optical phased arrays. The circuits are used to emit low divergence laser beams in the near infrared and steer them in two dimensions.
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Tyler, N. A., Guerber, S., Fowler, D., Malhouitre, S., Garcia, S., Grosse, P., Szelag, B. Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station. J. Vis. Exp. (158), e60269, doi:10.3791/60269 (2020).
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