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Fabricage van 3D Koolstof Micro-Elektromechanische Systemen (C-MEMS)
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JoVE Journal Engineering
Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)
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Fabricage van 3D Koolstof Micro-Elektromechanische Systemen (C-MEMS)

Nederlands

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11,963 Views

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08:01 min

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June 17, 2017

DOI:

10.3791/55649-v

DOI:
10.3791/55649-v

•

08:01 min
June 17, 2017

•

2 Views
, , ,
1School of Engineering and Sciences,Tecnologico de Monterrey, 2Department of Mechanical and Aerospace Engineering,University of California, 3BBB Inc

Summary

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Lange en holle glasachtige koolstofmicrofibers werden vervaardigd op basis van de pyrolyse van een natuurlijk product, menselijk haar. De twee fabricage stappen van koolstofmicro-elektromechanische en koolstofnanoelectromechanische systemen, of C-MEMS en C-NEMS, zijn: (i) fotolithografie van een koolstofrijke polymeervoorloper en (ii) pyrolyse van de gevormde polymeervoorloper.

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Cite this Article

Pramanick, B., Martinez-Chapa, S. O., Madou, M., Hwang, H. Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS). J. Vis. Exp. (124), e55649, doi:10.3791/55649 (2017).

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