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3D Karbon Mikroelektromekanik Sistemlerin (C-MEMS) İmalatı
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JoVE Journal Engineering
Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)
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3D Karbon Mikroelektromekanik Sistemlerin (C-MEMS) İmalatı

Türkçe

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11,953 Views

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08:01 min

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June 17, 2017

DOI:

10.3791/55649-v

DOI:
10.3791/55649-v

•

08:01 min
June 17, 2017

•

2 Views
, , ,
1School of Engineering and Sciences,Tecnologico de Monterrey, 2Department of Mechanical and Aerospace Engineering,University of California, 3BBB Inc

Summary

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Uzun ve içi boş camsı karbon mikroelyafları, doğal bir ürünün, insan saçının pirolizine dayalı olarak imal edilmiştir. Karbon mikroelektromekanik ve karbon nano elektromekanik sistemlerin veya C-MEMS ve C-NEMS'nin iki üretim aşaması şunlardır: (i) karbon açısından zengin bir polimer öncüsünün fotolitografisi ve (ii) desenli polimer öncüsünün pirolizi.

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Pramanick, B., Martinez-Chapa, S. O., Madou, M., Hwang, H. Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS). J. Vis. Exp. (124), e55649, doi:10.3791/55649 (2017).

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