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Engineering
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3D碳微机电系统(C-MEMS)的制造
JoVE Journal
Engineering
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JoVE Journal
Engineering
Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)
Please note that all translations are automatically generated.
Click here for the English version.
3D碳微机电系统(C-MEMS)的制造
DOI:
10.3791/55649-v
•
08:01 min
•
June 17, 2017
•
Bidhan Pramanick
,
Sergio O. Martinez-Chapa
,
Marc Madou
2
,
Hyundoo Hwang
3
1
School of Engineering and Sciences
,
Tecnologico de Monterrey
,
2
Department of Mechanical and Aerospace Engineering
,
University of California
,
3
BBB Inc
Chapters
00:05
Title
01:47
3D Polymer-based Carbon Structure Fabrication
05:12
3D Human Hair-derived Carbon Structure Fabrication
06:19
Results: Human Hair-derived 3D Carbon Microstructures
07:21
Conclusion
Summary
Automatic Translation
English (Original)
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Automatic Translation
基于天然产物,人发的热解制造长而中空的玻璃碳微纤维。碳微机电和碳纳米机电系统或C-MEMS和C-NEMS的两个制造步骤是:(i)富碳聚合物前体的光刻和(ii)图案化聚合物前体的热解。
Tags
3D Carbon Microelectromechanical Systems (C-MEMS)
Carbon Microelectromechanical Systems
Polymer Precursor
Carbon Fabrication
Carbon Structures
Isometric Shrinkage
Carbon Allotropes
Graphitic
Diamond-like
Glassy Carbon
Polymer Structure Fabrication
Spin Coating
Photoresist
Photolithography
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