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Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)
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Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

11,932 Views

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08:01 min

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June 17, 2017

DOI:

10.3791/55649-v

DOI:
10.3791/55649-v

•

08:01 min
June 17, 2017

•

6 Views
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1School of Engineering and Sciences,Tecnologico de Monterrey, 2Department of Mechanical and Aerospace Engineering,University of California, 3BBB Inc

Tags

3D Carbon Microelectromechanical Systems (C-MEMS)Carbon Microelectromechanical SystemsPolymer PrecursorCarbon FabricationCarbon StructuresIsometric ShrinkageCarbon AllotropesGraphiticDiamond-likeGlassy CarbonPolymer Structure FabricationSpin CoatingPhotoresistPhotolithography

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Pramanick, B., Martinez-Chapa, S. O., Madou, M., Hwang, H. Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS). J. Vis. Exp. (124), e55649, doi:10.3791/55649 (2017).

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