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基于侧向 NIPIN Phototransistors 的柔性图像传感器的研制
JoVE Journal
Engineering
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JoVE Journal Engineering
Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors
DOI:

09:59 min

June 23, 2018

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Chapters

  • 00:05Title
  • 00:26Si Doping and Isolation
  • 02:12Sacrificial Oxide Layer Deposition
  • 02:59Deposition of the First Layer of Polyimide and Performing the First Metallization
  • 04:43Deposition of the Second Layer of Polyimide and Performing the Second Metallization
  • 05:12Encapsulating the Sample with Polyimide and Opening via Holes and Mesh Structure
  • 05:56Etching the Sacrificial Layer and Transferring the Sample to a Flexible Substrate
  • 07:39Results: Current-Voltage Characteristics for the Phototransistor Array in the Curved State
  • 08:45Conclusion

Summary

Automatic Translation

本文提出了一种用于曲面图像传感器的可变形侧向 NIPIN 三极管阵列的详细方法。三极管阵列具有开放的网状形式, 由薄硅岛和可伸缩金属联网装置组成, 提供了灵活性和拉伸。参数分析仪的特点是制造三极管的电学性能。

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