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Fabricage van Surface Acoustic Wave-apparaten op lithium niobate
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JoVE Journal Engineering
Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
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Fabricage van Surface Acoustic Wave-apparaten op lithium niobate

Nederlands

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11,279 Views

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07:55 min

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June 18, 2020

DOI:

10.3791/61013-v

DOI:
10.3791/61013-v

•

07:55 min
June 18, 2020

•

28 Views
, ,
1Medically Advanced Devices Laboratory, Center for Medical Devices and Instrumentation, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering and Department of Surgery, School of Medicine,University of California San Diego

Summary

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Twee fabricagetechnieken, lift-off en natte etsen, worden beschreven in de productie van interdigitale elektrodetransducers op een piëzo-elektrisch substraat, lithium niobate, op grote schaal gebruikt om oppervlakte akoestische golven te genereren nu vinden breed nut in micro-tot nanoschaal vloeistof. De geproduceerde elektroden worden getoond om megahertz te veroorzaken om Rayleigh oppervlakte akoestische golven te bestellen.

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Cite this Article

Mei, J., Zhang, N., Friend, J. Fabrication of Surface Acoustic Wave Devices on Lithium Niobate. J. Vis. Exp. (160), e61013, doi:10.3791/61013 (2020).

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