Journal
/
공학
/
Kompakt Lens mindre Digital Holographic Mikroskop för MEMS inspektion och karakterisering
JoVE 신문
공학
JoVE 비디오를 활용하시려면 도서관을 통한 기관 구독이 필요합니다.  전체 비디오를 보시려면 로그인하거나 무료 트라이얼을 시작하세요.
JoVE 신문 공학
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Please note that all translations are automatically generated. Click here for the English version.

Kompakt Lens mindre Digital Holographic Mikroskop för MEMS inspektion och karakterisering

10,115 Views

•

10:28 min

•

July 05, 2016

DOI:

10.3791/53630-v

DOI:
10.3791/53630-v

•

10:28 min
July 05, 2016

•

7 Views
, , , ,
1School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering,Nanyang Technological University, 2d’Optron Pte Ltd

Tags

Compact Digital Holographic MicroscopeMEMS InspectionMEMS CharacterizationFull-field Optical MeasurementNon-contactReal-timeHigh-resolution3D MappingLens-lessCompactWafer InspectionMicro-opticsDiffractive OpticsBioimagingSilicon WaferGold Electrodes3D View SoftwareDMx 41BU02 CameraY800 Video FormatReflection Or Transmission Mode633 Nm Wavelength4.65 μm Pixel Size

Read Article

Cite this Article

Bourgade, T., Jianfei, S., Wang, Z., Elsa, R., Asundi, A. Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization. J. Vis. Exp. (113), e53630, doi:10.3791/53630 (2016).

Download .ris file

Copy

Share Video

.

Copy