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3D-dybdeprofilrekonstruksjon av segregerte urenheter ved bruk av sekundær ionmassespektrometri
JoVE Journal
Chemistry
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JoVE Journal Chemistry
3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry

3D-dybdeprofilrekonstruksjon av segregerte urenheter ved bruk av sekundær ionmassespektrometri

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1,405 Views

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07:10 min

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April 29, 2020

DOI:

10.3791/61065-v

DOI:
10.3791/61065-v

•

07:10 min
April 29, 2020

•

3 Views
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1Łukasiewicz Research Network-Institute of Electronic Materials Technology

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Michałowski, P. P., Zlotnik, S., Jóźwik, I., Chamryga, A., Rudziński, M. 3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry. J. Vis. Exp. (158), e61065, doi:10.3791/61065 (2020).

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