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3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
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April 29, 2020
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The presented method describes how to identify and solve measurement artifacts related to secondary ion mass spectrometry as well as obtain realistic 3D distributions of impurities/dopants in solid state materials.
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Michałowski, P. P., Zlotnik, S., Jóźwik, I., Chamryga, A., Rudziński, M. 3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry. J. Vis. Exp. (158), e61065, doi:10.3791/61065 (2020).
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