Journal
/
Chemistry
/
3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
JoVE Journal
Chemistry
This content is Free Access.
JoVE Journal Chemistry
3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry

English

Automatically Generated

1,480 Views

•

07:10 min

•

April 29, 2020

DOI:

10.3791/61065-v

DOI:
10.3791/61065-v

•

07:10 min
April 29, 2020

•

3 Views
, , , ,
1Łukasiewicz Research Network-Institute of Electronic Materials Technology

Summary

Automatically generated

The presented method describes how to identify and solve measurement artifacts related to secondary ion mass spectrometry as well as obtain realistic 3D distributions of impurities/dopants in solid state materials.

Explore More Videos

3D Depth ProfileSegregated ImpuritiesSecondary Ion Mass SpectrometrySemiconductor TechnologyStructural DefectsEutectic MixtureDefect-selective EtchingGallium NitrideScanning Electron MicroscopySIMS Calibration

Read Article

Cite this Article

Michałowski, P. P., Zlotnik, S., Jóźwik, I., Chamryga, A., Rudziński, M. 3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry. J. Vis. Exp. (158), e61065, doi:10.3791/61065 (2020).

Download .ris file

Copy

Share Video

.

Copy