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Mg3 N₂およびZn3N₂薄膜の血漿支援分子ビームエピタキシー成長

JoVE Journal
Engineering
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JoVE Journal Engineering

Plasma-Assisted Molecular Beam Epitaxy Growth of Mg₃N₂ and Zn₃N₂ Thin Films

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Mg3 N₂およびZn3N₂薄膜の血漿支援分子ビームエピタキシー成長

7,399 Views

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13:05 min

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May 11, 2019

DOI:

10.3791/59415-v

DOI:

10.3791/59415-v

•

13:05 min

May 11, 2019

•

4 Views

Peng Wu¹, Thomas Tiedje¹

¹Department of Electrical and Computer Engineering,University of Victoria

Summary

本稿では、窒素源および光学成長モニタリングとしてN2ガスを用いる血漿支援分子ビームエピタキシーによるMgO基板上のMg3N2及びZn3N2のエピタキシャルフィルムの増殖について述べた。

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