Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films

Peng Wu; Thomas Tiedje

doi:10.3791/59415

/

Plasma-Assisted Molecular Beam Epitaxy Growth of Mg 3 N 2 and Zn 3 N 2 Thin Films Plasma-Assisted Molecular Beam Epitaxy Growth of Mg 3 N 2 and Zn 3 N 2 Thin Films Plasma-Assisted Molecular Beam Epitaxy Growth of Mg₃N₂ and Zn₃N₂ Thin Films Plasma-

JoVE Journal
Engineering
Author Produced

A subscription to JoVE is required to view this content. Sign in or start your free trial.

JoVE Journal Engineering

Plasma-Assisted Molecular Beam Epitaxy Growth of Mg₃N₂ and Zn₃N₂ Thin Films

Please note that all translations are automatically generated. Click here for the English version.

Plasma-Assisted Molecular Beam Epitaxy Growth of Mg 3 N 2 and Zn 3 N 2 Thin Films Plasma-Assisted Molecular Beam Epitaxy Growth of Mg 3 N 2 and Zn 3 N 2 Thin Films Plasma-Assisted Molecular Beam Epitaxy Growth of Mg₃N₂ and Zn₃N₂ Thin Films Plasma-

7,399 Views

•

13:05 min

•

May 11, 2019

DOI:

10.3791/59415-v

DOI:

10.3791/59415-v

•

13:05 min

May 11, 2019

•

4 Views

Peng Wu¹, Thomas Tiedje¹

¹Department of Electrical and Computer Engineering,University of Victoria

Summary

Cet article décrit la croissance des films épitaxiaux de Mg₃N₂ et Zn₃N₂ sur les substrats MgO par épitaxie de faisceau moléculaire assistée par plasma avec le gaz N₂ comme source d'azote et surveillance optique de la croissance.

Explore More Videos

Plasma-assisted Molecular Beam Epitaxy Mg3N2 Zn3N2 II-V Compound Semiconductors Anti-bixbyite Crystal Structure MBE Growth MgO Substrate High-temperature Annealing RHEED Quartz Crystal Microbalance Sample Degassing Sample Transfer

Read Article

Plasma-Assisted Molecular Beam Epitaxy Growth of Mg 3 N 2 and Zn 3 N 2 Thin Films Plasma-Assisted Molecular Beam Epitaxy Growth of Mg 3 N 2 and Zn 3 N 2 Thin Films Plasma-Assisted Molecular Beam Epitaxy Growth of Mg₃N₂ and Zn₃N₂ Thin Films Plasma-

Automatically Generated

Summary

Automatically generated

Explore More Videos

Plasma-Assisted Molecular Beam Epitaxy Growth of Mg 3 N 2 and Zn 3 N 2 Thin Films Plasma-Assisted Molecular Beam Epitaxy Growth of Mg 3 N 2 and Zn 3 N 2 Thin Films Plasma-Assisted Molecular Beam Epitaxy Growth of Mg3N2 and Zn3N2 Thin Films Plasma-

Automatically Generated

Summary

Automatically generated

Explore More Videos

Plasma-Assisted Molecular Beam Epitaxy Growth of Mg 3 N 2 and Zn 3 N 2 Thin Films Plasma-Assisted Molecular Beam Epitaxy Growth of Mg 3 N 2 and Zn 3 N 2 Thin Films Plasma-Assisted Molecular Beam Epitaxy Growth of Mg₃N₂ and Zn₃N₂ Thin Films Plasma-