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ポリマー基板上へのマイクロ·サブミクロンのパターンを生成するためのリソグラフィMicropunching
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JoVE Journal Engineering
Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates
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ポリマー基板上へのマイクロ·サブミクロンのパターンを生成するためのリソグラフィMicropunching

日本語

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14,883 Views

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09:24 min

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July 02, 2012

DOI:

10.3791/3725-v

DOI:
10.3791/3725-v

•

09:24 min
July 02, 2012

•

13 Views
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1Mechanical and Aerospace Engineering,University of Texas at Arlington

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Chakraborty, A., Liu, X., Luo, C. Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates. J. Vis. Exp. (65), e3725, doi:10.3791/3725 (2012).

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