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Micropunching为微型和亚微米模式聚合物基板上生成的光刻
JoVE Journal
Engineering
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JoVE Journal Engineering
Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates
DOI:

09:24 min

July 02, 2012

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Chapters

  • 00:05Title
  • 01:05Cutting Operation in MPL: Overview and Initial Steps
  • 01:57Cutting Operation in MPL: Single-layer Microstructures on a Substrate
  • 02:36Cutting Operation in MPL: Multi-layer Microstructures on a Substrate
  • 04:44Drawing Operation in MPL: Making PDMS Micropillars on HDPE Channel Sidewalls
  • 06:25Microstructures Formed by Cutting and Drawing, and Their Application
  • 09:00Conclusion

Summary

Automatic Translation

开发一个micropunching光刻方法产生微观和亚微米图案,顶部,侧壁和底部表面的聚合物基板。它克服了图案化导电聚合物和产生侧壁模式的障碍。这种方法允许多个功能快速制作和侵略性的化学自由。

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