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Micropunching为微型和亚微米模式聚合物基板上生成的光刻
JoVE Journal
Engineering
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JoVE Journal
Engineering
Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates
Please note that all translations are automatically generated.
Click here for the English version.
Micropunching为微型和亚微米模式聚合物基板上生成的光刻
DOI:
10.3791/3725-v
•
09:24 min
•
July 02, 2012
•
Anirban Chakraborty
,
Xinchuan Liu
,
Cheng Luo
1
Mechanical and Aerospace Engineering
,
University of Texas at Arlington
Chapters
00:05
Title
01:05
Cutting Operation in MPL: Overview and Initial Steps
01:57
Cutting Operation in MPL: Single-layer Microstructures on a Substrate
02:36
Cutting Operation in MPL: Multi-layer Microstructures on a Substrate
04:44
Drawing Operation in MPL: Making PDMS Micropillars on HDPE Channel Sidewalls
06:25
Microstructures Formed by Cutting and Drawing, and Their Application
09:00
Conclusion
Summary
Automatic Translation
English (Original)
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Automatic Translation
开发一个micropunching光刻方法产生微观和亚微米图案,顶部,侧壁和底部表面的聚合物基板。它克服了图案化导电聚合物和产生侧壁模式的障碍。这种方法允许多个功能快速制作和侵略性的化学自由。
Tags
Micropunching Lithography
Generating Micro- And Submicron-patterns
Polymer Substrates
Conducting Polymers
Lithographic Techniques
Technical Challenges
Photolithographic Methods
Wet Etching
Dry Etching
Micro/nanosystems
Planar Form
Sidewall Patterns
3-D Circuits
Fluidic Channels
Horizontal Growth Of Nanowires And Nanotubes
Macropunching Method
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