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Journal / Engineering / 电介质元表面的等强度光束生成演示
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电介质元表面的等强度光束生成演示
 
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电介质元表面的等强度光束生成演示

Article DOI: 10.3791/59066-v • 09:33 min • June 7th, 2019
June 7th, 2019 •
1, 1, 1,2,3
1Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH), 2Department of Chemical Engineering, Pohang University of Science and Technology (POSTECH), 3National Institute of Nanomaterials Technology (NINT)

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提出了介电元表面的制造和光学表征方案。该方法不仅可用于光束分割器的制造,还可用于一般介电元表面的制造,如透镜、全息图和光学斗篷。

Tags

工程,问题148,光束分割器,傅立叶全息图,氢化非晶硅,电子束光刻,电感耦合等离子体反应电蚀刻,等离子增强化学气相沉积,宽带,极化独立性
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