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牺牲纳米颗粒使用删除散粒噪声的影响通过电子束光刻装配式接触孔
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JoVE Journal Engenharia
Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
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牺牲纳米颗粒使用删除散粒噪声的影响通过电子束光刻装配式接触孔

7,089 Views

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07:47 min

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February 12, 2017

DOI:

10.3791/54551-v

DOI:
10.3791/54551-v

•

07:47 min
February 12, 2017

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3 Views
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1Department of Chemistry,Portland State University, 2Logic Technology Department,Intel Corporation

Tags

Sacrificial NanoparticlesShot-noiseE-beam LithographyContact HolesSub-20 Nanometer PatternsRCA CleaningAATMSPMMAGold NanoparticlesEvaporation

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Cite this Article

Rananavare, S. B., Morakinyo, M. K. Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography. J. Vis. Exp. (120), e54551, doi:10.3791/54551 (2017).

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