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Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects
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Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects

Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects

9,148 Views

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09:15 min

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January 04, 2016

DOI:

10.3791/53614-v

DOI:
10.3791/53614-v

•

09:15 min
January 04, 2016

•

4 Views
1Research School of Engineering,Australian National University

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Cite this Article

Grant, N. E. Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects. J. Vis. Exp. (107), e53614, doi:10.3791/53614 (2016).

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