Journal
/
Ingenieurwesen
/
Metal-Assisted Electrochemical Nanoimprinting of Porous and Solid Silicon Wafers
JoVE Journal
Ingenieurwesen
Zum Anzeigen dieser Inhalte ist ein JoVE-Abonnement erforderlich.  Melden Sie sich an oder starten Sie Ihre kostenlose Testversion.
JoVE Journal Ingenieurwesen
Metal-Assisted Electrochemical Nanoimprinting of Porous and Solid Silicon Wafers

Metal-Assisted Electrochemical Nanoimprinting of Porous and Solid Silicon Wafers

DOI:
10.3791/61040-v

•

09:18 min

•

February 08, 2022

•

, , ,
1The Polytechnic School,Arizona State University

Kapitel

  • 00:05Introduction
  • 01:19Mac-imprint Stamp Preparation
  • 02:43Photoresist Ultraviolet (UV) Nanoimprinting
  • 04:05Gold and Silver/Gold Catalyst Thin Film Deposition
  • 05:17Silver/Gold Catalyst Thin Film Dealloying
  • 06:01Mac-imprint Operation
  • 07:33Results: Representative Au Porous Stamp and Si Mac-imprint Imaging
  • 08:31Conclusion

Summary

Automatische Übersetzung

Automatische Übersetzung

A protocol for metal-assisted chemical imprinting of 3D microscale features with sub-20 nm shape accuracy into solid and porous silicon wafers is presented.

Tags

Keywords: Metal-assisted Electrochemical NanoimprintingPorous SiliconSolid SiliconHierarchical MicrostructuresMetasurface-based Microoptic ElementsWaveguide TechnologiesOptical BiosensorsInfrared Optical DevicesIII-V SemiconductorsStamp To Substrate Tip And Tilt AlignmentRCA-1 SolutionPFOCSPDMSUV Nanoimprinting

Article

Embed

ZUR WIEDERGABELISTE HINZUFÜGEN

Usage Statistics

Verwandte Videos

check_url/de/61040?article_type=v

Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting
check_url/de/61040?article_type=v

Fabrication of VB2/Air Cells for Electrochemical Testing
check_url/de/61040?article_type=v

Monolayer Contact Doping of Silicon Surfaces and Nanowires Using Organophosphorus Compounds
check_url/de/61040?article_type=v

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
check_url/de/61040?article_type=v

Protocol of Electrochemical Test and Characterization of Aprotic Li-O2 Battery
check_url/de/61040?article_type=v

Emission Spectroscopic Boundary Layer Investigation during Ablative Material Testing in Plasmatron
check_url/de/61040?article_type=v

Electrochemical Etching and Characterization of Sharp Field Emission Points for Electron Impact Ionization
check_url/de/61040?article_type=v

Fabrication of White Light-emitting Electrochemical Cells with Stable Emission from Exciplexes
check_url/de/61040?article_type=v

Experimental Methods for Spin- and Angle-Resolved Photoemission Spectroscopy Combined with Polarization-Variable Laser
check_url/de/61040?article_type=v

A Silicon-tipped Fiber-optic Sensing Platform with High Resolution and Fast Response

Read Article