/
/
Síntese e Caracterização de alta c-eixo ZnO Thin Film por Plasma aprimorado Chemical Vapor Deposition Sistema e sua Aplicação Photodetector UV
A subscription to JoVE is required to view this content. Sign in or start your free trial.
15,039 Views
•
08:18 min
•
October 03, 2015
DOI:
Summary
Automatically generated
We offered a method to directly synthesize high c-axis (0002) ZnO thin film by plasma enhanced chemical vapor deposition. The as-synthesized ZnO thin film combined with Pt interdigitated electrode was used as sensing layer for ultraviolet photodetector, showing a high performance through a combination of its good responsivity and reliability.
Read Article
Cite this Article
Chao, C., Wei, D. Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application. J. Vis. Exp. (104), e53097, doi:10.3791/53097 (2015).
Copy