Journal
/
Engineering
/
Synthese und Charakterisierung von Hoch c-Achsen-ZnO-Dünnfilm durch Plasma Enhanced Chemical Vapor Deposition-System und seine UV-Photodetektor Anwendungs
JoVE Journal
Engineering
A subscription to JoVE is required to view this content.  Sign in or start your free trial.
JoVE Journal Engineering
Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application
Please note that all translations are automatically generated. Click here for the English version.

Synthese und Charakterisierung von Hoch c-Achsen-ZnO-Dünnfilm durch Plasma Enhanced Chemical Vapor Deposition-System und seine UV-Photodetektor Anwendungs

Deutsch

Automatically Generated

15,017 Views

•

08:18 min

•

October 03, 2015

DOI:

10.3791/53097-v

DOI:
10.3791/53097-v

•

08:18 min
October 03, 2015

•

3 Views
,
1Institute of Manufacturing Technology and Department of Mechanical Engineering,National Taipei University of Technology (TAIPEI TECH)

Explore More Videos

ZnO Thin FilmPECVDC-axis OrientationUV PhotodetectorXRDPLFE-SEMPt Interdigitated ElectrodesOhmic Contact

Read Article

Cite this Article

Chao, C., Wei, D. Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application. J. Vis. Exp. (104), e53097, doi:10.3791/53097 (2015).

Download .ris file

Copy

Share Video

.

Copy