Journal
/
工程学
/
Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application
JoVE 杂志
工程学
需要订阅 JoVE 才能查看此.  登录或开始免费试用。
JoVE 杂志 工程学
Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application

Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application

DOI:
10.3791/53097-v

•

08:18 min

•

October 03, 2015

•

,
1Institute of Manufacturing Technology and Department of Mechanical Engineering,National Taipei University of Technology (TAIPEI TECH)

Chapters

  • 00:05Title
  • 02:07Substrate Preparation and Cleaning
  • 02:37PECVD Chamber Preparation and Synthesis of ZnO Thin Films
  • 05:10RTA Process
  • 05:58Results: Synthesis and Characterization of ZnO Thin Films
  • 07:30Conclusion

Summary

自动翻译

自动翻译

We offered a method to directly synthesize high c-axis (0002) ZnO thin film by plasma enhanced chemical vapor deposition. The as-synthesized ZnO thin film combined with Pt interdigitated electrode was used as sensing layer for ultraviolet photodetector, showing a high performance through a combination of its good responsivity and reliability.

Tags

ZnO Thin FilmPECVDC-axis OrientationUV PhotodetectorXRDPLFE-SEMPt Interdigitated ElectrodesOhmic Contact

Article

Embed

添加到播放列表

Usage Statistics

Related Videos

Polycrystalline Silicon Thin-film Solar cells with Plasmonic-enhanced Light-trapping

Encapsulation and Permeability Characteristics of Plasma Polymerized Hollow Particles

Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting

Synthesis and Microdiffraction at Extreme Pressures and Temperatures

Making Record-efficiency SnS Solar Cells by Thermal Evaporation and Atomic Layer Deposition

Recombination Dynamics in Thin-film Photovoltaic Materials via Time-resolved Microwave Conductivity

In Situ Monitoring of the Accelerated Performance Degradation of Solar Cells and Modules: A Case Study for Cu(In,Ga)Se2 Solar Cells

Well-aligned Vertically Oriented ZnO Nanorod Arrays and their Application in Inverted Small Molecule Solar Cells

Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition

Bulk and Thin Film Synthesis of Compositionally Variant Entropy-stabilized Oxides

Read Article