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Micro-Mauerwerk für 3D-Additive Mikroproduktion
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JoVE Journal Engineering
Micro-masonry for 3D Additive Micromanufacturing
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Micro-Mauerwerk für 3D-Additive Mikroproduktion

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10,206 Views

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08:45 min

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August 01, 2014

DOI:

10.3791/51974-v

DOI:
10.3791/51974-v

•

08:45 min
August 01, 2014

•

1 Views
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1Mechanical Science and Engineering,University of Illinois at Urbana-Champaign

Summary

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Dieses Papier stellt eine 3D-additive Mikrofertigung Strategie (sog. "Mikromauerwerk ') für die flexible Fertigung von mikroelektromechanisches System (MEMS)-Strukturen und Geräte. Dieser Ansatz beinhaltet Transferdruck-basierte Montage von Mikro / nanoskaligen Materialien in Verbindung mit Rapid Thermal Annealing-fähigen Material Verbindungstechniken.

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Cite this Article

Keum, H., Kim, S. Micro-masonry for 3D Additive Micromanufacturing. J. Vis. Exp. (90), e51974, doi:10.3791/51974 (2014).

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