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Micro-masonry for 3D Additive Micromanufacturing
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August 01, 2014
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This paper introduces a 3D additive micromanufacturing strategy (termed ‘micro-masonry’) for the flexible fabrication of microelectromechanical system (MEMS) structures and devices. This approach involves transfer printing-based assembly of micro/nanoscale materials in conjunction with rapid thermal annealing-enabled material bonding techniques.
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Keum, H., Kim, S. Micro-masonry for 3D Additive Micromanufacturing. J. Vis. Exp. (90), e51974, doi:10.3791/51974 (2014).
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