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パルスレーザー蒸着法によるナノエンジニアリング透明導電性酸化物の作製
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Engineering
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JoVE Journal Engineering
Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
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パルスレーザー蒸着法によるナノエンジニアリング透明導電性酸化物の作製

日本語

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15,338 Views

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10:27 min

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February 27, 2013

DOI:

10.3791/50297-v

DOI:
10.3791/50297-v

•

10:27 min
February 27, 2013

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1 Views
, , , ,
1Department of Energy and NEMAS – Center for NanoEngineered Materials and Surfaces,Politecnico di Milano, 2Center for Nano Science and Technology,Instituto Italiano di Tecnologia

Summary

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我々は、バックグラウンドガスの存在下でナノ秒パルスレーザー堆積（PLD）法によるナノ構造酸化物薄膜を堆積させるための実験方法を説明します。この方法AlドープZnO（AZO）膜を用いて、ナノツリー林の階層構造にコンパクトから、堆積させることができる。

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Cite this Article

Gondoni, P., Ghidelli, M., Di Fonzo, F., Li Bassi, A., Casari, C. S. Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition. J. Vis. Exp. (72), e50297, doi:10.3791/50297 (2013).

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