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Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition
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Ingénierie
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Journal JoVE Ingénierie
Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

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10:27 min

February 27, 2013

DOI:

10:27 min
February 27, 2013

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Summary

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We describe the experimental method to deposit nanostructured oxide thin films by nanosecond Pulsed Laser Deposition (PLD) in the presence of a background gas. By using this method Al-doped ZnO (AZO) films, from compact to hierarchically structured as nano-tree forests, can be deposited.

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