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Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting
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Chapters
- 00:05Title
- 01:40Master Preparation
- 03:29Mould Fabrication
- 06:24Zinc Oxide Deposition
- 07:28Layer Transfer
- 08:25Results: Nanomoulding of Zinc Oxide through Chemical Vapor Deposition
- 09:59Conclusion
We describe a nanomoulding technique which allows low-cost nanoscale patterning of functional materials, materials stacks and full devices. Nanomoulding can be performed on any nanoimprinting setup and can be applied to a wide range of materials and deposition processes.
