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Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting
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Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting
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January 23, 2013
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We describe a nanomoulding technique which allows low-cost nanoscale patterning of functional materials, materials stacks and full devices. Nanomoulding can be performed on any nanoimprinting setup and can be applied to a wide range of materials and deposition processes.
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Battaglia, C., Söderström, K., Escarré, J., Haug, F., Despeisse, M., Ballif, C. Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting. J. Vis. Exp. (71), e50177, doi:10.3791/50177 (2013).
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