/

/

/

Радиочастотное магнетронное распыление термоэлектрических тонких пленок Bi₂Te₃ и Sb₂Te₃ на стеклянных подложках

JoVE Journal
Engineering

A subscription to JoVE is required to view this content. Sign in or start your free trial.

JoVE Journal Engineering

Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

Please note that all translations are automatically generated. Click here for the English version.

Радиочастотное магнетронное распыление термоэлектрических тонких пленок Bi₂Te₃ и Sb₂Te₃ на стеклянных подложках

403 Views

•

03:39 min

•

May 17, 2024

DOI:

10.3791/201298-v

DOI:

10.3791/201298-v

•

03:39 min

May 17, 2024

•

12 Views

Nurfarhana Ahmad Musri¹, Yoganash Putthisigamany¹, Puvaneswaran Chelvanathan¹, Norasikin Ahmad Ludin¹, Nadhrah Md Yatim², Ubaidah Syafiq¹

¹Solar Energy Research Institute (SERI),Universiti Kebangsaan Malaysia, ²Faculty of Science and Technology,Universiti Sains Islam Malaysia

Explore More Videos

Radio Frequency Magnetron Sputtering Bi2Te3 Sb2Te3 Thermoelectric Thin Films Glass Substrates Aluminum Shield Magnetron Holder Vacuum Chamber Pressure Gauge Cooler System Argon Gas Flow Rotation Speed Automatic Matching Network Controller Radio Frequency Power Supply Plasma

Read Article