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Deposition of Bi2Te3 and Sb2Te3 Thin Films on Glass Substrates via RF Sputtering
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Radio Frequency Magnetron Sputtering of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films on Glass Substrates
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工程学
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Radio Frequency Magnetron Sputtering of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films on Glass Substrates

Radio Frequency Magnetron Sputtering of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films on Glass Substrates

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03:39 min

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May 17, 2024

DOI:

10.3791/201298-v

DOI:
10.3791/201298-v

•

03:39 min
May 17, 2024

•

12 Views
, , , , ,
1Solar Energy Research Institute (SERI),Universiti Kebangsaan Malaysia, 2Faculty of Science and Technology,Universiti Sains Islam Malaysia

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Ahmad Musri, N., Putthisigamany, Y., Chelvanathan, P., Ahmad Ludin, N., Md Yatim, N., Syafiq, U. Radio Frequency Magnetron Sputtering of Bi2Te3 and Sb2Te3 Thermoelectric Thin Films on Glass Substrates. J. Vis. Exp. (Pending Publication), e201298, doi:10.3791/201298 (2024).

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