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ガラス基板上へのBi₂_Te3および_Sb2_Te3熱電薄膜の高周波マグネトロンスパッタリング

JoVE Journal
Engineering

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JoVE Journal Engineering

Radio Frequency Magnetron Sputtering of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films on Glass Substrates

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ガラス基板上へのBi₂_Te3および_Sb2_Te3熱電薄膜の高周波マグネトロンスパッタリング

399 Views

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03:39 min

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May 17, 2024

DOI:

10.3791/201298-v

DOI:

10.3791/201298-v

•

03:39 min

May 17, 2024

•

12 Views

Nurfarhana Ahmad Musri¹, Yoganash Putthisigamany¹, Puvaneswaran Chelvanathan¹, Norasikin Ahmad Ludin¹, Nadhrah Md Yatim², Ubaidah Syafiq¹

¹Solar Energy Research Institute (SERI),Universiti Kebangsaan Malaysia, ²Faculty of Science and Technology,Universiti Sains Islam Malaysia

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