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Atomically Traceable Nanostructure Fabrication
JoVE Journal
Mühendislik
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JoVE Journal Mühendislik
Atomically Traceable Nanostructure Fabrication

Atomically Traceable Nanostructure Fabrication

8,558 Views

12:35 min

July 17, 2015

DOI:

12:35 min
July 17, 2015

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We report a protocol for combining the atomic metrology of the Scanning Tunneling Microscope for surface patterning with selective Atomic Layer Deposition and Reactive Ion Etching. Using a robust process involving numerous atmospheric exposures and transport, 3D nanostructures with atomic metrology are fabricated.

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