ジャーナル
/
工学
/
Atomically Traceable Nanostructure Fabrication
JoVE Journal
工学
このコンテンツを視聴するには、JoVE 購読が必要です。  サインイン又は無料トライアルを申し込む。
JoVE Journal 工学
Atomically Traceable Nanostructure Fabrication

Atomically Traceable Nanostructure Fabrication

8,558 Views

•

12:35 min

•

July 17, 2015

DOI:

10.3791/52900-v

DOI:
10.3791/52900-v

•

12:35 min
July 17, 2015

•

1 Views
, , , , , , , , , , , , , , , ,
1Zyvex Labs, 2物理学科,University of Texas at Dallas, 3Department of Materials Science and Engineering,University of Texas at Dallas, 4Materials Science and Engineering,University of North Texas, 5National Institute of Standards and Technology

概要

Automatically generated

We report a protocol for combining the atomic metrology of the Scanning Tunneling Microscope for surface patterning with selective Atomic Layer Deposition and Reactive Ion Etching. Using a robust process involving numerous atmospheric exposures and transport, 3D nanostructures with atomic metrology are fabricated.

Explore More Videos

Atomic ScaleNanostructure FabricationHydrogen Depassivation LithographyAtomic Layer DepositionTitaniaReactive Ion EtchingNanofabrication ProcessFiducial MarksSi(100)-H Surface

Read Article

Cite this Article

Ballard, J. B., Dick, D. D., McDonnell, S. J., Bischof, M., Fu, J., Owen, J. H. G., Owen, W. R., Alexander, J. D., Jaeger, D. L., Namboodiri, P., Fuchs, E., Chabal, Y. J., Wallace, R. M., Reidy, R., Silver, R. M., Randall, J. N., Von Ehr, J. Atomically Traceable Nanostructure Fabrication. J. Vis. Exp. (101), e52900, doi:10.3791/52900 (2015).

Download .ris file

Copy

Share Video

.

Copy