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Atomically Traceable Nanostructure Fabrication
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Atomically Traceable Nanostructure Fabrication

Atomically Traceable Nanostructure Fabrication

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12:35 min

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July 17, 2015

DOI:

10.3791/52900-v

DOI:
10.3791/52900-v

•

12:35 min
July 17, 2015

•

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1Zyvex Labs, 2Department of Physics,University of Texas at Dallas, 3Department of Materials Science and Engineering,University of Texas at Dallas, 4Materials Science and Engineering,University of North Texas, 5National Institute of Standards and Technology

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Atomic ScaleNanostructure FabricationHydrogen Depassivation LithographyAtomic Layer DepositionTitaniaReactive Ion EtchingNanofabrication ProcessFiducial MarksSi(100)-H Surface

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Ballard, J. B., Dick, D. D., McDonnell, S. J., Bischof, M., Fu, J., Owen, J. H. G., Owen, W. R., Alexander, J. D., Jaeger, D. L., Namboodiri, P., Fuchs, E., Chabal, Y. J., Wallace, R. M., Reidy, R., Silver, R. M., Randall, J. N., Von Ehr, J. Atomically Traceable Nanostructure Fabrication. J. Vis. Exp. (101), e52900, doi:10.3791/52900 (2015).

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