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Micropunching为微型和亚微米模式聚合物基板上生成的光刻

JoVE Journal
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JoVE Journal Mühendislik

Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates

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Micropunching为微型和亚微米模式聚合物基板上生成的光刻

14,941 Views

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09:24 min

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July 02, 2012

DOI:

DOI:

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09:24 min

July 02, 2012

•

10 Views

Anirban Chakraborty¹, Xinchuan Liu¹, Cheng Luo¹

¹Mechanical and Aerospace Engineering,University of Texas at Arlington

Özet

开发一个micropunching光刻方法产生微观和亚微米图案，顶部，侧壁和底部表面的聚合物基板。它克服了图案化导电聚合物和产生侧壁模式的障碍。这种方法允许多个功能快速制作和侵略性的化学自由。

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