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Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
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Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology

7,540 Views

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09:20 min

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December 07, 2015

DOI:

10.3791/53260-v

DOI:
10.3791/53260-v

•

09:20 min
December 07, 2015

•

2 Views
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1Department of Microelectronics,Delft University of Technology

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Vollebregt, S., Ishihara, R. Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology. J. Vis. Exp. (106), e53260, doi:10.3791/53260 (2015).

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