JoVE 비디오를 활용하시려면 도서관을 통한 기관 구독이 필요합니다. 전체 비디오를 보시려면 로그인하거나 무료 트라이얼을 시작하세요.
Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
7,553 Views
•
09:20 min
•
December 07, 2015
DOI:
Summary
Automatically generated
A method for the growth of low temperature vertically-aligned carbon nanotubes, and the subsequent fabrication of vertical interconnect electrical test structures using semiconductor fabrication is presented.
Read Article
Cite this Article
Vollebregt, S., Ishihara, R. Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology. J. Vis. Exp. (106), e53260, doi:10.3791/53260 (2015).
Copy