Journal
/
Ingeniería
/
Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
JoVE Revista
Ingeniería
Se requiere una suscripción a JoVE para ver este contenido.  Inicie sesión o comience su prueba gratuita.
JoVE Revista Ingeniería
Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology

DOI:
10.3791/53260-v

•

09:20 min

•

December 07, 2015

•

,
1Department of Microelectronics,Delft University of Technology

Capítulos

  • 00:05Título
  • 00:46Bottom Metal and Interlayer Dielectric Deposition
  • 03:23Catalyst Deposition and CNT Growth
  • 05:07Topside Metallization
  • 07:17Results: Characterization of Vertically-aligned Carbon Nanotubes
  • 08:41Conclusion

Summary

Traducción Automática

Traducción Automática

A method for the growth of low temperature vertically-aligned carbon nanotubes, and the subsequent fabrication of vertical interconnect electrical test structures using semiconductor fabrication is presented.

Tags

Carbon NanotubesVertical InterconnectsLow-temperature GrowthSemiconductor Technology4-point Probe Test StructuresRaman SpectroscopyOhmic ContactResistivity

Article

Embed

Añadir a la lista de reproducción

Usage Statistics

Videos relacionados

Fabrication, Densification, and Replica Molding of 3D Carbon Nanotube Microstructures

Dry Oxidation and Vacuum Annealing Treatments for Tuning the Wetting Properties of Carbon Nanotube Arrays

Synthesis and Functionalization of Nitrogen-doped Carbon Nanotube Cups with Gold Nanoparticles as Cork Stoppers

Writing and Low-Temperature Characterization of Oxide Nanostructures

Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures

Advanced Experimental Methods for Low-temperature Magnetotransport Measurement of Novel Materials

Precision Milling of Carbon Nanotube Forests Using Low Pressure Scanning Electron Microscopy

High Temperature Fabrication of Nanostructured Yttria-Stabilized-Zirconia (YSZ) Scaffolds by In Situ Carbon Templating Xerogels

Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

Flow-assisted Dielectrophoresis: A Low Cost Method for the Fabrication of High Performance Solution-processable Nanowire Devices

Read Article