/

/

Micropunching为微型和亚微米模式聚合物基板上生成的光刻

JoVE Journal
Engenharia

É necessária uma assinatura da JoVE para visualizar este conteúdo. Faça login ou comece sua avaliação gratuita.

JoVE Journal Engenharia

Micropunching Lithography for Generating Micro- and Submicron-patterns on Polymer Substrates

Please note that all translations are automatically generated. Click here for the English version.

Micropunching为微型和亚微米模式聚合物基板上生成的光刻

14,928 Views

•

09:24 min

•

July 02, 2012

DOI:

DOI:

•

09:24 min

July 02, 2012

•

10 Views

Anirban Chakraborty¹, Xinchuan Liu¹, Cheng Luo¹

¹Mechanical and Aerospace Engineering,University of Texas at Arlington

Summary

开发一个micropunching光刻方法产生微观和亚微米图案，顶部，侧壁和底部表面的聚合物基板。它克服了图案化导电聚合物和产生侧壁模式的障碍。这种方法允许多个功能快速制作和侵略性的化学自由。

Explore More Videos

Micropunching Lithography Generating Micro- And Submicron-patterns Polymer Substrates Conducting Polymers Lithographic Techniques Technical Challenges Photolithographic Methods Wet Etching Dry Etching Micro/nanosystems Planar Form Sidewall Patterns 3-D Circuits Fluidic Channels Horizontal Growth Of Nanowires And Nanotubes Macropunching Method

Read Article