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The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors
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The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors

The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors

8,566 Views

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12:32 min

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May 24, 2020

DOI:

10.3791/60798-v

DOI:
10.3791/60798-v

•

12:32 min
May 24, 2020

•

11 Views
, , , ,
1School of Technology and Sciences,São Paulo State University – UNESP, 2Scholl of Electronic Engineering,Bangor University, 3Institute of Geosciences and Exact Sciences,São Paulo State University – UNESP

Summary

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Anodization parameters for growth of the aluminum-oxide dielectric layer of zinc-oxide thin-film transistors (TFTs) are varied to determine the effects on the electrical parameter responses. Analysis of variance (ANOVA) is applied to a Plackett-Burman design of experiments (DOE) to determine the manufacturing conditions that result in optimized device performance.

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Gomes, T. C., Kumar, D., Alves, N., Kettle, J., Fugikawa-Santos, L. The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors. J. Vis. Exp. (159), e60798, doi:10.3791/60798 (2020).

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