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音響ナノ流体工学のための表面音響波作動を組み込んだナノ高さチャネルの作製
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Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics
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音響ナノ流体工学のための表面音響波作動を組み込んだナノ高さチャネルの作製

5,556 Views

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07:23 min

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February 05, 2020

DOI:

10.3791/60648-v

DOI:
10.3791/60648-v

•

07:23 min
February 05, 2020

•

2 Views
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1Medically Advanced Devices Laboratory, Center for Medical Devices, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering, and the Department of Surgery, School of Medicine,University of California San Diego

Summary

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リフトオフフォトリソグラフィ、ナノ深度反応性イオンエッチング、室温プラズマによる音響ナノ流体用の表面音響波作動装置の積層を用いたナノ高位チャネルの作製を実証する単結晶リチウムニオブベートの表面活性化多層結合は、同様にニオブテリチウムを酸化物に結合するのにも同様に有用である。

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Cite this Article

Zhang, N., Friend, J. Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics. J. Vis. Exp. (156), e60648, doi:10.3791/60648 (2020).

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