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Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics
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Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics

Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics

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07:23 min

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February 05, 2020

DOI:

10.3791/60648-v

DOI:
10.3791/60648-v

•

07:23 min
February 05, 2020

•

2 Views
,
1Medically Advanced Devices Laboratory, Center for Medical Devices, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering, and the Department of Surgery, School of Medicine,University of California San Diego

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We demonstrate fabrication of nanoheight channels with the integration of surface acoustic wave actuation devices upon lithium niobate for acoustic nanofluidics via liftoff photolithography, nano-depth reactive ion etching, and room-temperature plasma surface-activated multilayer bonding of single-crystal lithium niobate, a process similarly useful for bonding lithium niobate to oxides.

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Nanoheight ChannelsSurface Acoustic WaveLithium NiobateAcoustic NanofluidicsNanofabricationPlasma BondingPhotolithographyReactive Ion EtchingChromium EtchingSolvent Cleaning

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Zhang, N., Friend, J. Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics. J. Vis. Exp. (156), e60648, doi:10.3791/60648 (2020).

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