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Fabricage van Nanoheight Channels waarin Surface Acoustic Wave Actuation via Lithium Niobate voor Akoestische Nanofluidics
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Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics
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Fabricage van Nanoheight Channels waarin Surface Acoustic Wave Actuation via Lithium Niobate voor Akoestische Nanofluidics

5,556 Views

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07:23 min

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February 05, 2020

DOI:

10.3791/60648-v

DOI:
10.3791/60648-v

•

07:23 min
February 05, 2020

•

2 Views
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1Medically Advanced Devices Laboratory, Center for Medical Devices, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering, and the Department of Surgery, School of Medicine,University of California San Diego

Summary

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We demonstreren fabricage van nanohoogtekanalen met de integratie van oppervlakte akoestische golfactuatie-apparaten op lithium niobate voor akoestische nanofluidica via liftoff fotolithografie, nano-diepte reactieve ionets en kamertemperatuurplasma oppervlakte-geactiveerde meerlaagse binding van enkelkristallithium niobaat, een proces dat ook nuttig is voor het plakken van lithiumniobate aan oxiden.

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Cite this Article

Zhang, N., Friend, J. Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics. J. Vis. Exp. (156), e60648, doi:10.3791/60648 (2020).

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