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通过用于声学纳米流体的尼奥布精锂结合表面声波驱动纳米高通道的制造
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Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics
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通过用于声学纳米流体的尼奥布精锂结合表面声波驱动纳米高通道的制造

5,556 Views

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07:23 min

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February 05, 2020

DOI:

10.3791/60648-v

DOI:
10.3791/60648-v

•

07:23 min
February 05, 2020

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2 Views
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1Medically Advanced Devices Laboratory, Center for Medical Devices, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering, and the Department of Surgery, School of Medicine,University of California San Diego

Summary

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通过提升光刻、纳米深度反应离子蚀刻和室温等离子体，演示了纳米高通道的制造，通过提升光刻、纳米深度反应离子蚀刻和室温等离子体，将表面声波驱动装置集成在硅基硅基硅基上单晶尼欧比锂的表面激活多层粘接，这一工艺同样适用于将氮化锂与氧化物粘接。

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Cite this Article

Zhang, N., Friend, J. Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics. J. Vis. Exp. (156), e60648, doi:10.3791/60648 (2020).

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